Research on Supercritical CO2 Cleaning of Silicon Wafer of its Surface Metallic Impurities

Research on Supercritical CO2 Cleaning of Silicon Wafer of its Surface Metallic Impurities

碩士 === 國立清華大學 === 化學學系 === 84 ===

Bibliographic Details
Main Authors:	Lin, Shin-Fa, 林新發
Other Authors:	Ling, Yong-Chien
Format:	Others
Language:	zh-TW
Published:	1996
Online Access:	http://ndltd.ncl.edu.tw/handle/32822431418907161117

Similar Items

Supercritical CO2 Assisted Electroless Deposition for Metallization on Silicon Wafer
by: An-Pang Chen, et al.
Published: (2015)

Gas-phase cleaning of silicon wafer surfaces
by: Lawing, Andrew S. (Andrew Scott)
Published: (2007)

Supercritical Carbon Dioxide Processing of Silicon Wafer Surfaces
by: Xie, Bo
Published: (2005)

Effects of Phosphorus Diffusion on Gettering of Metal Impurities in UMG Silicon Wafers
by: Sung Yean Yoon, et al.
Published: (2013-01-01)

HF vapor etching and cleaning of silicon wafer surfaces
by: Han, Yong-Pil, 1962-
Published: (2006)

Wafer surface cleaning for silicon homoepitaxy with and without ECR hydrogen plasma exposure
by: Kim, Hyoun-woo
Published: (2005)

Gettering Sinks for Metallic Impurities Formed by Carbon-Cluster Ion Implantation in Epitaxial Silicon Wafers for CMOS Image Sensor
by: Ayumi Onaka-Masada, et al.
Published: (2018-01-01)

A study on optimization process for wafer cleaning through supercritical carbon dioxide fluid method
by: Chi-jean Chain, et al.
Published: (2011)

Decontamination of Wastewater Containing PhotoresistSolvent from Wafer Cleaning by Continuous Supercritical Water Oxidation
by: Jr-ru Fan, et al.
Published: (2006)

The use of atomic force microscopy to assess the quality of cleaning and tribometric properties of a silicon wafer surface
by: Igor Mikheev, et al.
Published: (2019-06-01)

Simulation of infrared spectra of trace impurities in silicon wafers based on the multiple transmission–reflection infrared method
by: Xiaobin Lu
Published: (2021-01-01)

Photoacoustic experiments of metal sheets and silicon wafers.
Published: (1983)

Metal Impurity Redistribution in Crystalline Silicon for Photovoltaic Application
by: Falkenberg, Marie Aylin
Published: (2014)

Nano-Scale Measurement Roughness and its Shape of Silicon-Wafer Surface
by: Ta-Yu Huang, et al.
Published: (2000)

Study on Anti-Degradation Methods of Silicon Cutting Liquids and Wafer Cleaning after Cutting
by: CHANG, WEI-CHE, et al.
Published: (2017)

A Study of Ammonium Bifluoride as an Agent for Cleaning Silicon Contamination in the Wafer Dicing Process
by: Tsai, T.-H, et al.
Published: (2023)

Metal-induced crystallization of amorphous silicon by wafer bonding
by: Chun-Ping Chao, et al.
Published: (2002)

A Materials Approach to Silicon Wafer Level Contamination Issues from the Wet Clean Process
by: Hall, Lindsey H. (Lindsey Harrison)
Published: (1996)

METHOD FOR CLEANING AMARANTH SEEDS FROM IMPURITIES
by: Shmalko N.A., et al.
Published: (2017-09-01)

Supercritical CO2: a clean route to protein loaded microparticles
by: Warren, Marie Georgiou
Published: (2012)

Removal of Metal Ions from Aqueous Solution by Supercritical CO2 Extraction — The Advanced Water Clean Technology
by: Ti-Hul Fang, et al.
Published: (2002)

Progress in Fundamental Research into Supercritical Adsorption and its Impact on Clean Energy Technology
by: Li Zhou
Published: (2005-09-01)

Modeling and Predicting of Surface Roughness of Silicon Wafer Grinding
by: Zhang Jenwei, et al.
Published: (2007)

The determination of impurity concentrations in silicon
by: Jones, David John Gunning
Published: (2011)

Research of Silicon Wafer Thinning Technology
by: Hsi-Tien Liao, et al.
Published: (2005)

Research on Silicon Wafers Thinning and Planarization
by: Li-Sheng Hsu, et al.
Published: (2007)

The research of cleaning process with megasonic waves for SiC wafer
by: Hui-Lung Yu, et al.
Published: (2017)

Role of strain in the solid phase epitaxial regrowth of dopant and isovalent impurities co-doped silicon
by: Shin-Yang Liang, et al.
Published: (2013)

Wafer Production for Wet Cleaning Process in the Application of Megasonic Monitor
by: Lung-Hu Lin, et al.
Published: (2011)

Principle of probes and its measurement results for silicon wafers
by: CHIN-TANG YANG, et al.
Published: (2011)

Simulations of removal of molecular contaminants from silicon wafer surface
by: Godse, Uday B.
Published: (2012)

Investigation of Copper Out-Plating Mechanism on Silicon Wafer Surface
by: Chien, Hsu-Yueh
Published: (1995)

Research on Metal Surface Clean Technique of Light
by: pan chung yi, et al.
Published: (2018)

The adhesion of clean metal surfaces
by: Pfaelzer, P. F.
Published: (1971)

The characterisation of clean metal surfaces
by: Walls, John M.
Published: (1973)

Study on Surface/sub-surface damage induced by Precision grinding of Silicon Wafers
by: Pei-Huang Kao, et al.
Published: (2018)

Calcified Nanostructured Silicon Wafer Surfaces for Biosensing: Effects of Surface Modification on Bioactivity
by: Robert P. Weis, et al.
Published: (2002-01-01)

Evolution of Nitrogen Impurities in Metal-Silicon Binary Couples and their Effect on Silicide Formation
by: Ho, Kuo Ting
Published: (1984)

Depth Profiling Analysis of Transition Metals in Thermally Treated Silicon Wafer
by: I-Long Chang, et al.
Published: (2003)

Fracture of silicon wafers and silicon beam transducers
by: McLaughlin, J. C.
Published: (1988)