Real-time Monitoring, Control, and Diagnosis Expert System in Semiconductor Manufacturing

Real-time Monitoring, Control, and Diagnosis Expert System in Semiconductor Manufacturing

碩士 === 國立清華大學 === 工業工程研究所 === 84 ===

Bibliographic Details
Main Authors:	Lin, Sheng Jer, 林聖哲
Other Authors:	Chen, Fei Long
Format:	Others
Language:	zh-TW
Published:	1996
Online Access:	http://ndltd.ncl.edu.tw/handle/82872501914544594167

Similar Items

An Approach for Developing Real-time Process Control and Diagnosis Expert System for Semiconductor Industry
by: Huang, Wen-Jian, et al.
Published: (1996)

An Expert System of Maintenance in Semiconductor Manufacturing
by: Meng-Hua Li, et al.
Published: (1998)

Tunnel-Based Real-Time Display System for Semiconductor Manufacturing
by: Lin Chia-Te, et al.
Published: (1998)

An Expert System for Decision Making in Shipping Policy with Abnormal Event in Semiconductor Manufacturing
by: Lin YenHsi, et al.
Published: (2011)

Expert System Based Telemetry Analysis for Real-Time Monitoring and Control of Complex Spacecraft
by: Cruse, Bryant C.
Published: (1989)

Semiconductor Manufacturing Process Monitoring Using Machine Learning Control Chart
by: Wei-Ting Lin, et al.
Published: (2018)

Architecture Design of A Cloud-based Real-time Big Data Gathering and Analysis System - A Case of a Solar Energy Monitoring System
by: Sheng-Jhe Huang, et al.
Published: (2014)

Performance monitoring of run-to-run control systems used in semiconductor manufacturing
by: Prabhu, Amogh V., 1983-
Published: (2012)

An Expert System of Quality Diagnosis for Computer Monitors
by: 徐承言

Monitoring and Control of Semiconductor Manufacturing Using Acoustic Techniques
by: Williams, Frances R.
Published: (2005)

Study of Cell Controller in Semiconductor Manufacturing
by: Lin Chen, et al.
Published: (1999)

The implementation of a real-time expert system for temperature control
by: CHEN,JIA-WEI, et al.
Published: (1991)

Information Security Risk and Cost of Capital: Evidence In Taiwan Semiconductor Industry
by: SHENG-CHE LIN, et al.
Published: (2017)

A Real Time Expert Control System for Helicopter Autorotation
by: Sunberg, Zachary Nolan
Published: (2013)

A real-time expert system shell for process control.
by: Kang, Alan Montzy
Published: (2018)

AIR CONDITION CHILLER WATER SYSTEM WITH INVERTER POWER SAVING CONTROLS
by: Sheng-Jer Chiou, et al.
Published: (2012)

The Integration and Research of Production Controlling in Semiconductor Manufacturing
by: TIAN MING LIN, et al.
Published: (2005)

Establishment and Application of an Expert System for Semiconductor Facility Management Control System
by: Ju Te Huang, et al.
Published: (2007)

Design and implementation of an active furnace monitoring system in semiconductor manufacturing
by: Mao,Wei-Lung, et al.
Published: (1996)

Ensuring the real-time behaviour of expert systems
by: Goodwin, J.
Published: (1997)

EXPERT SYSTEMS FOR MANUFACTURING
by: Juan Carlos Chaves de Oña
Published: (2011-07-01)

Integration of organic semiconductor devices for real-time monitoring nitric oxide
by: 葉士德
Published: (2010)

Real-time diagnosis of hydrogen gas system and seal-oil system in power plant using expert system
by: CHEN,JIAN-YI, et al.
Published: (1991)

WIP Allocation and Control Considering Time Constraint in a Semiconductor Manufacturing System
by: 黃嘉常
Published: (2007)

REAL-TIME MONITORING AND DIAGNOSIS FOR BEARING VIBRATION
by: I KAI CHEN, et al.
Published: (2018)

Reduction of process monitoring in semiconductor chip manufacturing
by: Amar, Ajay, 1964-
Published: (2005)

Equipment Control System for Semiconductor Manufacturing Automation
by: Wu, Ja-Kuei, et al.
Published: (1997)

Integration Data Mining Technology and Real-Time Feedback Control Algorithm To Improve Manufacturing Process In Semiconductor Industry
by: Chi-Yung Liu, et al.
Published: (2005)

Real-time operational control of flexible manufacturing systems
by: Chutima, Parames
Published: (1995)

Real-time Analysis and Control for Smart Manufacturing Systems
Published: (2020)

The Real Time Combination Dispatching Rule in Consideration of the Production Performance in the Semiconductor Manufacturing Factory
by: Feng, Yun-Min, et al.
Published: (1997)

The Study of Rank Revealing QR Factorization
by: Lin, Sheng Jer, et al.
Published: (1995)

Construction of an expert system for semiconductor etching process
by: Kuo, Wen-Chia, et al.
Published: (2010)

An Objected-Based Real-Time Diagnostic Expert System
by: Tseng, Chung-Ming, et al.
Published: (1994)

Design and Manufacture of a Microfluidic Cell Culture and Real-Time Monitoring System
by: Kuan-Yu Chen, et al.
Published: (2011)

Automated malfunction diagnosis of semiconductor fabrication equipment using a hybrid neural expert system
by: Kim, Byungwhan
Published: (2007)

Using real-time system monitor method to enhance Manufacturing yield-An Application to Manufacturing Company W
by: Che-Yu Chang, et al.
Published: (2017)

Real-Time Remote Monitoring and Control of a Hybrid Generation/Energy Storage System Using Internet and Programmable Logic Controller
by: Jer-Haur Chang, et al.
Published: (2006)

Systematically design of expert system based manufacturing system controller
by: 陳星光
Published: (1997)

Manufacturing Execution System For Semiconductor Manufacturing
by: Li Wu-Chung, et al.
Published: (1998)