Thermally Driven Polysilicon Actuators for Lateral Displacement

碩士 === 國立交通大學 === 機械工程研究所 === 84 === A novel one-mask polysilicon actuators driven by thermal is developed, modeled and tested. The structure is heated current due to resistive dissipation. Thermal strain is induced is magnified by two me...

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Bibliographic Details
Main Authors:	Ming-Fa Wu, 吳明發
Other Authors:	Wensyang Hsu
Format:	Others
Language:	en_US
Published:	1996
Online Access:	http://ndltd.ncl.edu.tw/handle/01015989300753086848

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spelling	ndltd-TW-084NCTU04890162016-02-05T04:16:37Z http://ndltd.ncl.edu.tw/handle/01015989300753086848 Thermally Driven Polysilicon Actuators for Lateral Displacement 熱動式橫向位移複晶矽制動器 Ming-Fa Wu 吳明發碩士國立交通大學機械工程研究所 84 A novel one-mask polysilicon actuators driven by thermal is developed, modeled and tested. The structure is heated current due to resistive dissipation. Thermal strain is induced is magnified by two mechanical mechanisms - lever and The device is texted in air and has a lateral 8um-displacement by applying a 4.2V dc bias. The simulation results are shown to with experimental data well. The maximum output force is with a built-in cantilever beam and is calculated to be about 10^-6N. Wensyang Hsu 徐文祥 1996 學位論文 ; thesis 40 en_US
collection	NDLTD
language	en_US
format	Others
sources	NDLTD
description	碩士 === 國立交通大學 === 機械工程研究所 === 84 === A novel one-mask polysilicon actuators driven by thermal is developed, modeled and tested. The structure is heated current due to resistive dissipation. Thermal strain is induced is magnified by two mechanical mechanisms - lever and The device is texted in air and has a lateral 8um-displacement by applying a 4.2V dc bias. The simulation results are shown to with experimental data well. The maximum output force is with a built-in cantilever beam and is calculated to be about 10^-6N.
author2	Wensyang Hsu
author_facet	Wensyang Hsu Ming-Fa Wu 吳明發
author	Ming-Fa Wu 吳明發
spellingShingle	Ming-Fa Wu 吳明發 Thermally Driven Polysilicon Actuators for Lateral Displacement
author_sort	Ming-Fa Wu
title	Thermally Driven Polysilicon Actuators for Lateral Displacement
title_short	Thermally Driven Polysilicon Actuators for Lateral Displacement
title_full	Thermally Driven Polysilicon Actuators for Lateral Displacement
title_fullStr	Thermally Driven Polysilicon Actuators for Lateral Displacement
title_full_unstemmed	Thermally Driven Polysilicon Actuators for Lateral Displacement
title_sort	thermally driven polysilicon actuators for lateral displacement
publishDate	1996
url	http://ndltd.ncl.edu.tw/handle/01015989300753086848
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Thermally Driven Polysilicon Actuators for Lateral Displacement

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