Studies of Anodic Alumina Formed on Sputtered Thin Al Films
博士 === 國立交通大學 === 電子研究所 === 84 === A systematic research about the effect of various processing parameters on the anodic oxide formation on Al thin films depos- ted on Si wafer coated with thermal oxide and borophosphosilica- te glass (BPSG) has been cond...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1995
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| Online Access: | http://ndltd.ncl.edu.tw/handle/44661885211218961567 |