Three Electrodes Capacitive Pressure Sensor

• Main Authors: Yang, Li-Chia, 楊禮嘉
• Other Authors: Kow-Ming Chang, Yu-Chung Hung
• Format: Others
• Language: zh-TW
• Published: 1996
• Online Access: http://ndltd.ncl.edu.tw/handle/67817994272649683848

碩士 === 國立交通大學 === 電子研究所 === 84 === Microelectromechanical systems (MEMS) is predicted to be the star offuture industry. By means of the IC technology, the mechanical properties ofsilicon can be applied to many fields in our life. Microsensors and microactuators are the typical applications in this field, among the otherthings. The key point of this thesis focuses on the fabrication processes of the three electrodes capacitive pressure sensor. A detailed study of processes will be showed, especially in cavity formation and p+ layer formation.Nevertheless, we also mention an introduction about the design considerations. Finally, to improve the study of capacitive pressure sensor, we give a sincerethinking in chapter four.