CVD Epitaxial Deposition in a Vertical Barrel reactor: Process Modeling Using Fuzzy Logic Models
碩士 === 國立交通大學 === 控制工程系 === 84 === A CVD epitaxial deposition process modeling using fuzzy logic models has beenproposed. The algorithm starts with cluster estimation method and back propagationalgorithm to construct a number of modeling st...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1996
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| Online Access: | http://ndltd.ncl.edu.tw/handle/88281333592363259074 |