Origins of Internal Stress and Optical Properties of Diamond Films

碩士 === 國立交通大學 === 材料科學與工程研究所 === 84 === Diamond films were deposited on P-type (100) silicon substrate by a hot filament chemical vapor deposition (HFCVD) system with reactant gases of CH4 and H2. Effects of CH4/H2 ratio, deposition time, deposition temp...

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Bibliographic Details
Main Authors: Chou, Shien Lien, 周先廉
Other Authors: Cheng-Tzu Kuo
Format: Others
Language:zh-TW
Published: 1996
Online Access:http://ndltd.ncl.edu.tw/handle/50583246491883440947

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