Origins of Internal Stress and Optical Properties of Diamond Films
碩士 === 國立交通大學 === 材料科學與工程研究所 === 84 === Diamond films were deposited on P-type (100) silicon substrate by a hot filament chemical vapor deposition (HFCVD) system with reactant gases of CH4 and H2. Effects of CH4/H2 ratio, deposition time, deposition temp...
Main Authors: | Chou, Shien Lien, 周先廉 |
---|---|
Other Authors: | Cheng-Tzu Kuo |
Format: | Others |
Language: | zh-TW |
Published: |
1996
|
Online Access: | http://ndltd.ncl.edu.tw/handle/50583246491883440947 |
Similar Items
-
Effect of Process Variables on Optical Properties of Diamond Film
by: Weng-Cheng Lien, et al.
Published: (1993) -
Studies on the Process and Optical Properties of the Diamond Film
by: Chen Kow Cheng, et al.
Published: (1995) -
IR optical properties in thin films of diamond
by: Petersson, Anna
Published: (2011) -
The Effect of Argon Addition on the Internal Stress in Diamond Film
by: Hwang. Chin Tzu, et al.
Published: (1993) -
The Effect of Argon Addition on the Internal Stress in Diamond Film
by: Huang, Jin-Zi, et al.
Published: (1993)