Preparation and Characterization of Reactively Sputteree TiAlN Films

Preparation and Characterization of Reactively Sputteree TiAlN Films

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博士 === 國立成功大學 === 材料科學工程研究所 === 84 ===

Bibliographic Details
Main Authors:	Xu, Bo-Yuan, 許博淵
Other Authors:	Huang, Zhao-Rui
Format:	Others
Language:	zh-TW
Published:	1996
Online Access:	http://ndltd.ncl.edu.tw/handle/26008401034753543253

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