Preparation and Characterization of Reactively Sputteree TiAlN Films

Preparation and Characterization of Reactively Sputteree TiAlN Films

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博士 === 國立成功大學 === 材料科學工程研究所 === 84 ===

Bibliographic Details
Main Authors: Xu, Bo-Yuan, 許博淵
Other Authors: Huang, Zhao-Rui
Format: Others
Language:zh-TW
Published: 1996
Online Access:http://ndltd.ncl.edu.tw/handle/26008401034753543253
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spelling ndltd-TW-084NCKU40580032016-02-05T04:16:32Z http://ndltd.ncl.edu.tw/handle/26008401034753543253 Preparation and Characterization of Reactively Sputteree TiAlN Films 反應濺鍍TiAlN薄膜製程參數及性質之研究 Xu, Bo-Yuan 許博淵 博士 國立成功大學 材料科學工程研究所 84 Huang, Zhao-Rui 黃肇瑞 1996 學位論文 ; thesis 85 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 博士 === 國立成功大學 === 材料科學工程研究所 === 84 ===
author2 Huang, Zhao-Rui
author_facet Huang, Zhao-Rui
Xu, Bo-Yuan
許博淵
author Xu, Bo-Yuan
許博淵
spellingShingle Xu, Bo-Yuan
許博淵
Preparation and Characterization of Reactively Sputteree TiAlN Films
author_sort Xu, Bo-Yuan
title Preparation and Characterization of Reactively Sputteree TiAlN Films
title_short Preparation and Characterization of Reactively Sputteree TiAlN Films
title_full Preparation and Characterization of Reactively Sputteree TiAlN Films
title_fullStr Preparation and Characterization of Reactively Sputteree TiAlN Films
title_full_unstemmed Preparation and Characterization of Reactively Sputteree TiAlN Films
title_sort preparation and characterization of reactively sputteree tialn films
publishDate 1996
url http://ndltd.ncl.edu.tw/handle/26008401034753543253
work_keys_str_mv AT xuboyuan preparationandcharacterizationofreactivelysputtereetialnfilms
AT xǔbóyuān preparationandcharacterizationofreactivelysputtereetialnfilms
AT xuboyuan fǎnyīngjiàndùtialnbáomózhìchéngcānshùjíxìngzhìzhīyánjiū
AT xǔbóyuān fǎnyīngjiàndùtialnbáomózhìchéngcānshùjíxìngzhìzhīyánjiū
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