基材氮化處理及TiAl中介層對TiAlN薄膜性質影響的研究

基材氮化處理及TiAl中介層對TiAlN薄膜性質影響的研究

碩士 === 國立成功大學 === 材料科學與工程研究所 === 84 ===

Bibliographic Details
Main Authors:	Lin, Ming Hong, 林明弘
Other Authors:	Huang, Zhao Rui
Format:	Others
Language:	zh-TW
Published:	1996
Online Access:	http://ndltd.ncl.edu.tw/handle/65526234018484466687

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