| Summary: | 碩士 === 中華大學 === 電機工程研究所 === 84 === The application of ion beam towards industry and academy rises increasingly high nowadays. However, researches on ion beam's images and their density distributions were still very few. The purpose of this paper aimed to construct an ion beam imaging system for directly measuring the ion beam's images. The density distributions of ion beams were then acquired by the computer codes. Also, by the computer simulation, we obtained the simulated ion beam tracks as a comparison to the experimental results. The ion beam imaging system consists of a vacuum system, a linear transmission platform and a microchannel plate (MCP). We also designed and assembled an electron-impact ion source and an ion lens. The ion source consists of an ion generator and a set of ion lenses for extracting and accelerating the ion beam. The ion lens that utilized unipotential lenses were used to adjust the ion beam tracks, in our experiment, the ion beam imaging system can be used to directly measure the images of an ion beam with diameters less than 25 mm and energies less than 200 keV. Meanwhile, the experimental results of the ion beam images are in good agreement with our computer simulations of ion beam tracks.
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