Processing and properties of nitride coatings by plasma-assisted physical vapor deposition

Processing and properties of nitride coatings by plasma-assisted physical vapor deposition

博士 === 大同工學院 === 機械工程研究所 === 83 ===

Bibliographic Details
Main Authors: He, Wei You, 何偉友
Other Authors: Li, Shen Zhi
Format: Others
Language:zh-TW
Published: 1995
Online Access:http://ndltd.ncl.edu.tw/handle/89657306626533258104
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spelling ndltd-TW-083TTIT24890352016-07-15T04:12:57Z http://ndltd.ncl.edu.tw/handle/89657306626533258104 Processing and properties of nitride coatings by plasma-assisted physical vapor deposition 電漿輔助物理氣相沉積氮化塗層之製程及特性研究 He, Wei You 何偉友 博士 大同工學院 機械工程研究所 83 Li, Shen Zhi 李深智 1995 學位論文 ; thesis 0 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 博士 === 大同工學院 === 機械工程研究所 === 83 ===
author2 Li, Shen Zhi
author_facet Li, Shen Zhi
He, Wei You
何偉友
author He, Wei You
何偉友
spellingShingle He, Wei You
何偉友
Processing and properties of nitride coatings by plasma-assisted physical vapor deposition
author_sort He, Wei You
title Processing and properties of nitride coatings by plasma-assisted physical vapor deposition
title_short Processing and properties of nitride coatings by plasma-assisted physical vapor deposition
title_full Processing and properties of nitride coatings by plasma-assisted physical vapor deposition
title_fullStr Processing and properties of nitride coatings by plasma-assisted physical vapor deposition
title_full_unstemmed Processing and properties of nitride coatings by plasma-assisted physical vapor deposition
title_sort processing and properties of nitride coatings by plasma-assisted physical vapor deposition
publishDate 1995
url http://ndltd.ncl.edu.tw/handle/89657306626533258104
work_keys_str_mv AT heweiyou processingandpropertiesofnitridecoatingsbyplasmaassistedphysicalvapordeposition
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AT héwěiyǒu diànjiāngfǔzhùwùlǐqìxiāngchénjīdànhuàtúcéngzhīzhìchéngjítèxìngyánjiū
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