STUDY ON THE ULTRA-THIN OXIDES GROWN BY A MICROWAVE AFTERGLOW PLASMA OXIDATION SYSTEM

STUDY ON THE ULTRA-THIN OXIDES GROWN BY A MICROWAVE AFTERGLOW PLASMA OXIDATION SYSTEM

博士 === 國立清華大學 === 電機工程研究所 === 83 ===

Bibliographic Details
Main Authors:	Chen Po Ching, 陳柏菁
Other Authors:	Hwang Huey Liang
Format:	Others
Language:	en_US
Published:	1995
Online Access:	http://ndltd.ncl.edu.tw/handle/22039803203288155487

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