Research of optical silicon nitride thin films by ion-assisted deposition

碩士 === 國立中央大學 === 光電(科學)研究所 === 83 ===

Bibliographic Details
Main Authors:	Sharu-Lii Chen, 陳學禮
Other Authors:	Cheng-Chung Lee
Format:	Others
Language:	zh-TW
Published:	1995
Online Access:	http://ndltd.ncl.edu.tw/handle/99774287044108241374

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spelling	ndltd-TW-083NCU001230222015-10-13T12:53:41Z http://ndltd.ncl.edu.tw/handle/99774287044108241374 Research of optical silicon nitride thin films by ion-assisted deposition 離子助鍍氮化矽光學薄膜特性之研究 Sharu-Lii Chen 陳學禮碩士國立中央大學光電(科學)研究所 83 Cheng-Chung Lee 李正中 1995 學位論文 ; thesis 0 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立中央大學 === 光電(科學)研究所 === 83 ===
author2	Cheng-Chung Lee
author_facet	Cheng-Chung Lee Sharu-Lii Chen 陳學禮
author	Sharu-Lii Chen 陳學禮
spellingShingle	Sharu-Lii Chen 陳學禮 Research of optical silicon nitride thin films by ion-assisted deposition
author_sort	Sharu-Lii Chen
title	Research of optical silicon nitride thin films by ion-assisted deposition
title_short	Research of optical silicon nitride thin films by ion-assisted deposition
title_full	Research of optical silicon nitride thin films by ion-assisted deposition
title_fullStr	Research of optical silicon nitride thin films by ion-assisted deposition
title_full_unstemmed	Research of optical silicon nitride thin films by ion-assisted deposition
title_sort	research of optical silicon nitride thin films by ion-assisted deposition
publishDate	1995
url	http://ndltd.ncl.edu.tw/handle/99774287044108241374
work_keys_str_mv	AT sharuliichen researchofopticalsiliconnitridethinfilmsbyionassisteddeposition AT chénxuélǐ researchofopticalsiliconnitridethinfilmsbyionassisteddeposition AT sharuliichen lízizhùdùdànhuàxìguāngxuébáomótèxìngzhīyánjiū AT chénxuélǐ lízizhùdùdànhuàxìguāngxuébáomótèxìngzhīyánjiū
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Research of optical silicon nitride thin films by ion-assisted deposition

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