The Excitation of Plasma by Long Length Radio Frequency Wave With an Application to a CO2 Laser Pumping

• Main Authors: Jame-Ming Huang, 黃正明
• Other Authors: Hei-Pei Liu
• Format: Others
• Language: zh-TW
• Published: 1995
• Online Access: http://ndltd.ncl.edu.tw/handle/69655083237543021157

碩士 === 國立中央大學 === 太空科學研究所 === 83 === This paper discusses the motion of charged particles that are under the influence of high frequency electric field, but the magnetic fields are neglected. We are insterested in those questions such as the amplitudes of electrons, current densities and the total power that the plasma absorbed when it is constrained in an isolated tube. We made switching power supplies to generate plasma in the experiment, at the same time, the switching frequency matches the characteristic frequency of the discharge network contributed by main power circuit and machinery constructions and plasma resistance, so it forms a resonant circuit to achieve maxima power delivering to the plasma. We successfully improve some problems that the D. C. discharge or RF (Radio Frequency) have. By changing the device into a Fabry-Perot resonant cavity, we apply this method to generate the CO2 laser and we obtain the laser power of 130W and over 10% efficiency. We had tried different electrodes geometry in order to know whether the electrode geometry or the electric field strength that influences the plasma densities or laser power.