Development of Cu CVD technology and reliability issue of Cu metallization relevant to ULSI application

博士 === 國立交通大學 === 電子研究所 === 83 ===

Bibliographic Details
Main Author:	邱榮照
Other Authors:	Cai, Chun-Jin
Format:	Others
Language:	zh-TW
Published:	1994
Online Access:	http://ndltd.ncl.edu.tw/handle/91148812354627573572

id	ndltd-TW-083NCTU6430102
record_format	oai_dc
spelling	ndltd-TW-083NCTU64301022015-10-13T12:53:41Z http://ndltd.ncl.edu.tw/handle/91148812354627573572 Development of Cu CVD technology and reliability issue of Cu metallization relevant to ULSI application 銅化學氣相沉積技術開發與銅金屬化系統之可靠度研究邱榮照博士國立交通大學電子研究所 83 Cai, Chun-Jin 陳茂傑 1994 學位論文 ; thesis 0 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	博士 === 國立交通大學 === 電子研究所 === 83 ===
author2	Cai, Chun-Jin
author_facet	Cai, Chun-Jin 邱榮照
author	邱榮照
spellingShingle	邱榮照 Development of Cu CVD technology and reliability issue of Cu metallization relevant to ULSI application
author_sort	邱榮照
title	Development of Cu CVD technology and reliability issue of Cu metallization relevant to ULSI application
title_short	Development of Cu CVD technology and reliability issue of Cu metallization relevant to ULSI application
title_full	Development of Cu CVD technology and reliability issue of Cu metallization relevant to ULSI application
title_fullStr	Development of Cu CVD technology and reliability issue of Cu metallization relevant to ULSI application
title_full_unstemmed	Development of Cu CVD technology and reliability issue of Cu metallization relevant to ULSI application
title_sort	development of cu cvd technology and reliability issue of cu metallization relevant to ulsi application
publishDate	1994
url	http://ndltd.ncl.edu.tw/handle/91148812354627573572
work_keys_str_mv	AT qiūróngzhào developmentofcucvdtechnologyandreliabilityissueofcumetallizationrelevanttoulsiapplication AT qiūróngzhào tónghuàxuéqìxiāngchénjījìshùkāifāyǔtóngjīnshǔhuàxìtǒngzhīkěkàodùyánjiū
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Development of Cu CVD technology and reliability issue of Cu metallization relevant to ULSI application

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