Fabrication and Simulation of Embedded Attenuated Phase Shift Mask
碩士 === 國立交通大學 === 應用化學系 === 83 === The fabrication, defect inspection and repair of an embedded attenuated phase shift mask (EAPSM) are nearly identical to the conventional mask,therefore,EAPSM gained much attention from semiconductor indus...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1995
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| Online Access: | http://ndltd.ncl.edu.tw/handle/36498672638927638254 |