Low Temperature Electron Cyclotron Resonance Oxidation with Low Thermal Budget Annealing
碩士 === 國立交通大學 === 電子研究所 === 83 === In this thesis,we successfully utilize the rapid thermal O2, N2, and N2O annealing technology to improve the quality of the ultra-low temperature (-20?C) electron cyclotron resonance (ECR) thin oxide. Amon...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1995
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| Online Access: | http://ndltd.ncl.edu.tw/handle/64384961082973421703 |