Fabrication and characterization of porous silicon

碩士 === 國立交通大學 === 光電(科學)研究所 === 83 === To perform the fabriaction and characterization of porous silicon is the goal of this thesis. In experiment, we find that the thermal conductivity of porous silicon is 2.8 W/m‧℃ ,which is as smaller as...

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Bibliographic Details
Main Authors:	Yang-Jer Gau, 高揚哲
Other Authors:	Jin-Shown Shie
Format:	Others
Language:	zh-TW
Published:	1995
Online Access:	http://ndltd.ncl.edu.tw/handle/58707992973341275407

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record_format	oai_dc
spelling	ndltd-TW-083NCTU01230162015-10-13T12:53:37Z http://ndltd.ncl.edu.tw/handle/58707992973341275407 Fabrication and characterization of porous silicon 多孔矽的製作與特性探討 Yang-Jer Gau 高揚哲碩士國立交通大學光電(科學)研究所 83 To perform the fabriaction and characterization of porous silicon is the goal of this thesis. In experiment, we find that the thermal conductivity of porous silicon is 2.8 W/m‧℃ ,which is as smaller as a factor of 53 than crystalline silicon. Hence, the porous silicon can be used as a isolating plate in thermal microsensors. Using this technique, a thermal pad with lower stress and higher yield will be achieved. Jin-Shown Shie 謝正雄 1995 學位論文 ; thesis 47 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立交通大學 === 光電(科學)研究所 === 83 === To perform the fabriaction and characterization of porous silicon is the goal of this thesis. In experiment, we find that the thermal conductivity of porous silicon is 2.8 W/m‧℃ ,which is as smaller as a factor of 53 than crystalline silicon. Hence, the porous silicon can be used as a isolating plate in thermal microsensors. Using this technique, a thermal pad with lower stress and higher yield will be achieved.
author2	Jin-Shown Shie
author_facet	Jin-Shown Shie Yang-Jer Gau 高揚哲
author	Yang-Jer Gau 高揚哲
spellingShingle	Yang-Jer Gau 高揚哲 Fabrication and characterization of porous silicon
author_sort	Yang-Jer Gau
title	Fabrication and characterization of porous silicon
title_short	Fabrication and characterization of porous silicon
title_full	Fabrication and characterization of porous silicon
title_fullStr	Fabrication and characterization of porous silicon
title_full_unstemmed	Fabrication and characterization of porous silicon
title_sort	fabrication and characterization of porous silicon
publishDate	1995
url	http://ndltd.ncl.edu.tw/handle/58707992973341275407
work_keys_str_mv	AT yangjergau fabricationandcharacterizationofporoussilicon AT gāoyángzhé fabricationandcharacterizationofporoussilicon AT yangjergau duōkǒngxìdezhìzuòyǔtèxìngtàntǎo AT gāoyángzhé duōkǒngxìdezhìzuòyǔtèxìngtàntǎo
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Fabrication and characterization of porous silicon

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