Summary: | 碩士 === 國立交通大學 === 工業工程研究所 === 83 === With the increase in memory density, large chip size, small
pattern size, and complicated cell structure, achieving high
yield is hindered. Therefore, it is an important issue
surrounding the IC industrial to maintain an effectively high
yield. With an increasing yield of DRAM's, it is also an
important factor that the design of circuits in wafer improves
the manufacturing process and reduces defects. In general, the
typical chip architecture of DRAM's is divided into various
sections. The spare elements are prepared in each section. The
section division and number of spare elements effectively
impact yield and the cost of chips. Therefore, it is very
important to establish a yield model which can accurately
analyze section division and the number of spare elements. The
yield model employed analyze section division and the number of
spare elements based on negative bynomial yield model. This
yield model is established by the architecture of 16 Mb DRAM's.
The data of redundancy scheme is obtained by observing bitmap
of 16 Mb DRAM's and employed to compute the unknown parameters
of the negative bynomial yield model. It is proposed that the
optimized section division and redundancy scheme of 16 Mb DRAM'
s can reach the decided yield model.
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