The Study of ZnS Thin Films by Atomic Layer Epitaxy
碩士 === 國立成功大學 === 電機工程研究所 === 83 === Atomic Layer Epitaxy is a stepwise deposition process by su- pplying the sources materials alternatively.This deposition te- chnique provides monolayer control of the deposited film thick- ness and unifo...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1995
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| Online Access: | http://ndltd.ncl.edu.tw/handle/97810032775445755086 |