The formation of calcium lanthanum sulfide powder for infrared ray application
碩士 === 國立成功大學 === 材料科學(工程)研究所 === 83 === The Al/Mo/Ni thin film was investigated for the potential application as the under bump metallurgy between silicon and solder. The Al/Mo/Ni thin film were prepared by sputtering. It was investigated...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
1995
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Online Access: | http://ndltd.ncl.edu.tw/handle/87803074989447657485 |
Summary: | 碩士 === 國立成功大學 === 材料科學(工程)研究所 === 83 === The Al/Mo/Ni thin film was investigated for the potential
application as the under bump metallurgy between silicon and
solder. The Al/Mo/Ni thin film were prepared by sputtering. It
was investigated for the effect of Al,Mo,Ni thin film
thickness on the adhesion of Si/Al/Mo/Ni and the effect of wave
soldering parameters on the solder bump morphology. The
experimental results showed that the increase in thickness of Ni
,degraded the adhesion of Si/Al/Mo/Ni. The sputtering rate of
Ni is as low as 1.4*/sec. The increase in conveyor speed during
wave soldering roughened the surface appearance of the solder
on Si/Al/Mo/Ni . It was uneasy to achieve a complete solder
coverage on the bump with Si/Al/Mo/Ni as the under bump
metallurgy. It was find to be able to achieve better bump
structure when Pd was applied replacing Ni. When the conveyor
speed of wave soldering of Si/Al/Mo/Pd is 0.5m/min,the solder
can complete wet on the Pd layer. A conveyor speed as high as
1.5m/min,resulted in incomplete solder coverage. Tailing and
bridging were observed in the solder bump at unsuitable
conveyor speed. Al diffused into the Si substrate when Si/Al/Mo/
Ni/Pb-Sn was heat treated at 150℃for 600 hours,while Al
penetrated through Mo to diffuse into the Pd-Sn deposits after
900 hours of heat treatment. A thickness of 6000* Mo were able
to prevent interdiffusion betwwen Al and Sn at 600 hours of
heat treatment. According to the experimental results,Ni was
not appropriate as a diffusion barrier,intead,it acts as a
wetting layer.
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