| Summary: | 碩士 === 中原大學 === 機械工程研究所 === 83 === In this paper, the way is introducted to design analysis
programming and computer automatic noncontact measurement
system comprised of interferometer and rotation stage for
sphericity measurement and form error analysis of a ball. A
window software package has developed in chinese for sampling
analysis for phase -shift interferogram. Using a
interferometer with the software package, it is not only
measuring high precision optical parts automatrically but also
providing quantity analysis of vary int- erferometric
measurement. The system design is similar to Fizeau
interferometer and is considered its convenience and
economic for proceeding a larger dimensional measurement. It
is easy by mean of faster alignment to obtain
interferomtric fringe and data analysis during measurment
rotated from 0°to 360°later. First, every sphericitical range
of rolling ball is caculated by the minimum zone method.
Then algorithm development and error analysis for flatness,
cicularity and sphericity is executed by defined and
statisticed related variable status of repeat profile
measurement in confidence intervals. The requirement of one
exat solution and mininum error is satisfied by comparing
with least square method. This result can be tranfered
to industrial application for measuring high precision flatness
and sphericity.
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