Development of a SLAM II-based simulation testbed for evaluating photolithography area scheduling/dispatching schemes in IC fabrication

Development of a SLAM II-based simulation testbed for evaluating photolithography area scheduling/dispatching schemes in IC fabrication

碩士 === 國立臺灣大學 === 機械工程學研究所 === 82 ===

Bibliographic Details
Main Authors: Chen, Jun Ming, 陳君銘
Other Authors: Lu, Xiu Xiong
Format: Others
Language:zh-TW
Published: 1995
Online Access:http://ndltd.ncl.edu.tw/handle/21507751738336142093
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spelling ndltd-TW-082NTU024890742016-02-08T04:06:23Z http://ndltd.ncl.edu.tw/handle/21507751738336142093 Development of a SLAM II-based simulation testbed for evaluating photolithography area scheduling/dispatching schemes in IC fabrication 以黃光區為中心之半導體製造排程模擬與評估 Chen, Jun Ming 陳君銘 碩士 國立臺灣大學 機械工程學研究所 82 Lu, Xiu Xiong Zhang, Shi Zhong 呂秀雄 張時中 1995 學位論文 ; thesis 0 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立臺灣大學 === 機械工程學研究所 === 82 ===
author2 Lu, Xiu Xiong
author_facet Lu, Xiu Xiong
Chen, Jun Ming
陳君銘
author Chen, Jun Ming
陳君銘
spellingShingle Chen, Jun Ming
陳君銘
Development of a SLAM II-based simulation testbed for evaluating photolithography area scheduling/dispatching schemes in IC fabrication
author_sort Chen, Jun Ming
title Development of a SLAM II-based simulation testbed for evaluating photolithography area scheduling/dispatching schemes in IC fabrication
title_short Development of a SLAM II-based simulation testbed for evaluating photolithography area scheduling/dispatching schemes in IC fabrication
title_full Development of a SLAM II-based simulation testbed for evaluating photolithography area scheduling/dispatching schemes in IC fabrication
title_fullStr Development of a SLAM II-based simulation testbed for evaluating photolithography area scheduling/dispatching schemes in IC fabrication
title_full_unstemmed Development of a SLAM II-based simulation testbed for evaluating photolithography area scheduling/dispatching schemes in IC fabrication
title_sort development of a slam ii-based simulation testbed for evaluating photolithography area scheduling/dispatching schemes in ic fabrication
publishDate 1995
url http://ndltd.ncl.edu.tw/handle/21507751738336142093
work_keys_str_mv AT chenjunming developmentofaslamiibasedsimulationtestbedforevaluatingphotolithographyareaschedulingdispatchingschemesinicfabrication
AT chénjūnmíng developmentofaslamiibasedsimulationtestbedforevaluatingphotolithographyareaschedulingdispatchingschemesinicfabrication
AT chenjunming yǐhuángguāngqūwèizhōngxīnzhībàndǎotǐzhìzàopáichéngmónǐyǔpínggū
AT chénjūnmíng yǐhuángguāngqūwèizhōngxīnzhībàndǎotǐzhìzàopáichéngmónǐyǔpínggū
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