| Summary: | 碩士 === 國立海洋大學 === 電子工程學系 === 82 === Electromagnetic surface waves can be used to sustain plasma.
The wave is excited at one extremity of the plasma column by a
so-called wave launcher, and then travels along both the plasma
column that it sustains and the dielectrics enclosing it. These
media constitute the sole propagating structure for the wave.
Surface modes are slow electromagnetic waves propagating along
a plasma surface. The surface wave energy dissipates
almost completely into the plasma. Thus, an efficient enough
surface wave launcher can heat or sustain a plasma. An UHF
structure called a surfatron will be utilized for execitation
of a traveling surface wave which will sustain a plasma column
acting as a propagating medium. The interest in surface wave
discharges comes in part from the versatility of their
operating conditions. These discharges can be operate over a
broad range of applied frequencies (from 1 MHz to ~10 GHz), of
pressures (from ~1mTorr to a few times the atmospheric
pressure), and of discharge tube radius (from about 0.5 mm to
above 10 cm). Surface-wave produced plasma are part of a larger
class of high frequency (HF) discharges, termed traveling-wave
discharges (TWD). In this work, we will discuss the phase and
the attenuation characteristic of surface wave discharge
operating at the azimuthal symmetric mode.
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