The effects of RF and DC glow discharge cleaning method on aluminum vacuum surfaces by SIMS analysis

The effects of RF and DC glow discharge cleaning method on aluminum vacuum surfaces by SIMS analysis

碩士 === 國立清華大學 === 原子科學研究所 === 82 ===

Bibliographic Details
Main Authors: Lee, Wen Hau, 李文豪
Other Authors: Chen June Rong
Format: Others
Language:zh-TW
Published: 1994
Online Access:http://ndltd.ncl.edu.tw/handle/21646429271383881807
id ndltd-TW-082NTHU0257009
record_format oai_dc
spelling ndltd-TW-082NTHU02570092016-07-18T04:09:48Z http://ndltd.ncl.edu.tw/handle/21646429271383881807 The effects of RF and DC glow discharge cleaning method on aluminum vacuum surfaces by SIMS analysis 以SIMS分析真空材料表面上射頻輝光放電的清洗效果 Lee, Wen Hau 李文豪 碩士 國立清華大學 原子科學研究所 82 Chen June Rong 陳俊榮 1994 學位論文 ; thesis 0 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立清華大學 === 原子科學研究所 === 82 ===
author2 Chen June Rong
author_facet Chen June Rong
Lee, Wen Hau
李文豪
author Lee, Wen Hau
李文豪
spellingShingle Lee, Wen Hau
李文豪
The effects of RF and DC glow discharge cleaning method on aluminum vacuum surfaces by SIMS analysis
author_sort Lee, Wen Hau
title The effects of RF and DC glow discharge cleaning method on aluminum vacuum surfaces by SIMS analysis
title_short The effects of RF and DC glow discharge cleaning method on aluminum vacuum surfaces by SIMS analysis
title_full The effects of RF and DC glow discharge cleaning method on aluminum vacuum surfaces by SIMS analysis
title_fullStr The effects of RF and DC glow discharge cleaning method on aluminum vacuum surfaces by SIMS analysis
title_full_unstemmed The effects of RF and DC glow discharge cleaning method on aluminum vacuum surfaces by SIMS analysis
title_sort effects of rf and dc glow discharge cleaning method on aluminum vacuum surfaces by sims analysis
publishDate 1994
url http://ndltd.ncl.edu.tw/handle/21646429271383881807
work_keys_str_mv AT leewenhau theeffectsofrfanddcglowdischargecleaningmethodonaluminumvacuumsurfacesbysimsanalysis
AT lǐwénháo theeffectsofrfanddcglowdischargecleaningmethodonaluminumvacuumsurfacesbysimsanalysis
AT leewenhau yǐsimsfēnxīzhēnkōngcáiliàobiǎomiànshàngshèpínhuīguāngfàngdiàndeqīngxǐxiàoguǒ
AT lǐwénháo yǐsimsfēnxīzhēnkōngcáiliàobiǎomiànshàngshèpínhuīguāngfàngdiàndeqīngxǐxiàoguǒ
AT leewenhau effectsofrfanddcglowdischargecleaningmethodonaluminumvacuumsurfacesbysimsanalysis
AT lǐwénháo effectsofrfanddcglowdischargecleaningmethodonaluminumvacuumsurfacesbysimsanalysis
_version_ 1718352967965343744

Similar Items