Interfacial Reactions of Titanium and Palladium Thin Films on Silicon

博士 === 國立清華大學 === 材料科學(工程)研究所 === 82 ===

Bibliographic Details
Main Authors:	Jiann-Fu Chen, 陳建富
Other Authors:	Lih-Juann Chen
Format:	Others
Language:	en_US
Published:	1994
Online Access:	http://ndltd.ncl.edu.tw/handle/47007147685537974512

id	ndltd-TW-082NTHU0159002
record_format	oai_dc
spelling	ndltd-TW-082NTHU01590022016-07-18T04:09:48Z http://ndltd.ncl.edu.tw/handle/47007147685537974512 Interfacial Reactions of Titanium and Palladium Thin Films on Silicon 鈦、鈀薄膜與矽材料界面反應研究 Jiann-Fu Chen 陳建富博士國立清華大學材料科學(工程)研究所 82 Lih-Juann Chen 陳力俊 1994 學位論文 ; thesis 0 en_US
collection	NDLTD
language	en_US
format	Others
sources	NDLTD
description	博士 === 國立清華大學 === 材料科學(工程)研究所 === 82 ===
author2	Lih-Juann Chen
author_facet	Lih-Juann Chen Jiann-Fu Chen 陳建富
author	Jiann-Fu Chen 陳建富
spellingShingle	Jiann-Fu Chen 陳建富 Interfacial Reactions of Titanium and Palladium Thin Films on Silicon
author_sort	Jiann-Fu Chen
title	Interfacial Reactions of Titanium and Palladium Thin Films on Silicon
title_short	Interfacial Reactions of Titanium and Palladium Thin Films on Silicon
title_full	Interfacial Reactions of Titanium and Palladium Thin Films on Silicon
title_fullStr	Interfacial Reactions of Titanium and Palladium Thin Films on Silicon
title_full_unstemmed	Interfacial Reactions of Titanium and Palladium Thin Films on Silicon
title_sort	interfacial reactions of titanium and palladium thin films on silicon
publishDate	1994
url	http://ndltd.ncl.edu.tw/handle/47007147685537974512
work_keys_str_mv	AT jiannfuchen interfacialreactionsoftitaniumandpalladiumthinfilmsonsilicon AT chénjiànfù interfacialreactionsoftitaniumandpalladiumthinfilmsonsilicon AT jiannfuchen tàibǎbáomóyǔxìcáiliàojièmiànfǎnyīngyánjiū AT chénjiànfù tàibǎbáomóyǔxìcáiliàojièmiànfǎnyīngyánjiū
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Interfacial Reactions of Titanium and Palladium Thin Films on Silicon

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