Properties of SAW on Proton Exchanged LiNbO3 Using Octanoic Acid

• Main Authors: WANG, SHENG TZ, 王升資
• Other Authors: CHEN, YING CHUNG
• Format: Others
• Language: zh-TW
• Published: 1994
• Online Access: http://ndltd.ncl.edu.tw/handle/32206561373166821990

碩士 === 國立中山大學 === 電機工程研究所 === 82 === By the fabrication and testing of surface wave (SAW) delay line on pure and proton-exchanged (PE) Z-cut Y-propagation LiNbO3 substrates, the influences of PE process using pure octanoic acid on the SAW properties are investigated. Experiments show that PE process will decrease the central frequency, SAW velocity and electromechanical coupling coefficient of delay line, but the delay time and insertion loss will be increased. Annealing process can recover those properties except the electromechanical coupling coefficient value. Besides, the temperature coefficient of central frequency (TCF) are investgated. By SIMS, XRD and SEM analysis, the phenomenon caused by PE process on the substrates is discussed, too. The experimental results show that the PE substrates still behave good quality of SAW properties and are suitable to manufacture acoustic devices.