Fabrication of the package of vertical emitting semiconductor laser
碩士 === 國立交通大學 === 光電(科學)研究所 === 82 === This thesis is to study a novel technology of the fabrication of a vertical emitting semiconductor laser.this technique is a combination of an edge emitting semiconductor laser and a silicon micro-mach...
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ndltd-TW-082NCTU01230202016-07-18T04:09:34Z http://ndltd.ncl.edu.tw/handle/12890215033972556247 Fabrication of the package of vertical emitting semiconductor laser 垂直發射的雷射封裝結構之製作 Li Jiann Chang 李建昌 碩士 國立交通大學 光電(科學)研究所 82 This thesis is to study a novel technology of the fabrication of a vertical emitting semiconductor laser.this technique is a combination of an edge emitting semiconductor laser and a silicon micro-machining U-groove which has forty-five degree mirror-like oblique planes made by oxidation-smooth method.With the edge emitting semiconductor laser packaged on the bottom of the U-groove,reflected light will be perpendicular to the incident light,that is,as a vertical emitting semiconductor laser.This vertical emitting structure with simplifying laser package has the advantage for automation. Shie Jin Shown 謝正雄 1994 學位論文 ; thesis 51 zh-TW |
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碩士 === 國立交通大學 === 光電(科學)研究所 === 82 === This thesis is to study a novel technology of the fabrication
of a vertical emitting semiconductor laser.this technique is a
combination of an edge emitting semiconductor laser and a
silicon micro-machining U-groove which has forty-five degree
mirror-like oblique planes made by oxidation-smooth method.With
the edge emitting semiconductor laser packaged on the bottom of
the U-groove,reflected light will be perpendicular to the
incident light,that is,as a vertical emitting semiconductor
laser.This vertical emitting structure with simplifying laser
package has the advantage for automation.
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author2 |
Shie Jin Shown |
author_facet |
Shie Jin Shown Li Jiann Chang 李建昌 |
author |
Li Jiann Chang 李建昌 |
spellingShingle |
Li Jiann Chang 李建昌 Fabrication of the package of vertical emitting semiconductor laser |
author_sort |
Li Jiann Chang |
title |
Fabrication of the package of vertical emitting semiconductor laser |
title_short |
Fabrication of the package of vertical emitting semiconductor laser |
title_full |
Fabrication of the package of vertical emitting semiconductor laser |
title_fullStr |
Fabrication of the package of vertical emitting semiconductor laser |
title_full_unstemmed |
Fabrication of the package of vertical emitting semiconductor laser |
title_sort |
fabrication of the package of vertical emitting semiconductor laser |
publishDate |
1994 |
url |
http://ndltd.ncl.edu.tw/handle/12890215033972556247 |
work_keys_str_mv |
AT lijiannchang fabricationofthepackageofverticalemittingsemiconductorlaser AT lǐjiànchāng fabricationofthepackageofverticalemittingsemiconductorlaser AT lijiannchang chuízhífāshèdeléishèfēngzhuāngjiégòuzhīzhìzuò AT lǐjiànchāng chuízhífāshèdeléishèfēngzhuāngjiégòuzhīzhìzuò |
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