Fabrication of the package of vertical emitting semiconductor laser

碩士 === 國立交通大學 === 光電(科學)研究所 === 82 === This thesis is to study a novel technology of the fabrication of a vertical emitting semiconductor laser.this technique is a combination of an edge emitting semiconductor laser and a silicon micro-mach...

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Main Authors: Li Jiann Chang, 李建昌
Other Authors: Shie Jin Shown
Format: Others
Language:zh-TW
Published: 1994
Online Access:http://ndltd.ncl.edu.tw/handle/12890215033972556247
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spelling ndltd-TW-082NCTU01230202016-07-18T04:09:34Z http://ndltd.ncl.edu.tw/handle/12890215033972556247 Fabrication of the package of vertical emitting semiconductor laser 垂直發射的雷射封裝結構之製作 Li Jiann Chang 李建昌 碩士 國立交通大學 光電(科學)研究所 82 This thesis is to study a novel technology of the fabrication of a vertical emitting semiconductor laser.this technique is a combination of an edge emitting semiconductor laser and a silicon micro-machining U-groove which has forty-five degree mirror-like oblique planes made by oxidation-smooth method.With the edge emitting semiconductor laser packaged on the bottom of the U-groove,reflected light will be perpendicular to the incident light,that is,as a vertical emitting semiconductor laser.This vertical emitting structure with simplifying laser package has the advantage for automation. Shie Jin Shown 謝正雄 1994 學位論文 ; thesis 51 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立交通大學 === 光電(科學)研究所 === 82 === This thesis is to study a novel technology of the fabrication of a vertical emitting semiconductor laser.this technique is a combination of an edge emitting semiconductor laser and a silicon micro-machining U-groove which has forty-five degree mirror-like oblique planes made by oxidation-smooth method.With the edge emitting semiconductor laser packaged on the bottom of the U-groove,reflected light will be perpendicular to the incident light,that is,as a vertical emitting semiconductor laser.This vertical emitting structure with simplifying laser package has the advantage for automation.
author2 Shie Jin Shown
author_facet Shie Jin Shown
Li Jiann Chang
李建昌
author Li Jiann Chang
李建昌
spellingShingle Li Jiann Chang
李建昌
Fabrication of the package of vertical emitting semiconductor laser
author_sort Li Jiann Chang
title Fabrication of the package of vertical emitting semiconductor laser
title_short Fabrication of the package of vertical emitting semiconductor laser
title_full Fabrication of the package of vertical emitting semiconductor laser
title_fullStr Fabrication of the package of vertical emitting semiconductor laser
title_full_unstemmed Fabrication of the package of vertical emitting semiconductor laser
title_sort fabrication of the package of vertical emitting semiconductor laser
publishDate 1994
url http://ndltd.ncl.edu.tw/handle/12890215033972556247
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AT lǐjiànchāng chuízhífāshèdeléishèfēngzhuāngjiégòuzhīzhìzuò
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