Summary: | 碩士 === 國立交通大學 === 光電(科學)研究所 === 82 === This thesis is to study a novel technology of the fabrication
of a vertical emitting semiconductor laser.this technique is a
combination of an edge emitting semiconductor laser and a
silicon micro-machining U-groove which has forty-five degree
mirror-like oblique planes made by oxidation-smooth method.With
the edge emitting semiconductor laser packaged on the bottom of
the U-groove,reflected light will be perpendicular to the
incident light,that is,as a vertical emitting semiconductor
laser.This vertical emitting structure with simplifying laser
package has the advantage for automation.
|