Laser Reflection Interferometry in-situ Charactization of Diamond Film Deposited by Chloromethane and Methane Reactants in a Hot-Filament CVD
碩士 === 國立成功大學 === 化學工程研究所 === 82 === The laser reflective interferometry (LRI) has been set up to in-situ monitor the diamond film growth in a hot-filament Chemical vapor deposition reactor. It was then successfully employed to comp...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1994
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| Online Access: | http://ndltd.ncl.edu.tw/handle/88592702809208874354 |