The investigation of spectroscopic ellipsometer by polarization modulation method

碩士 === 國立臺灣大學 === 電機工程研究所 === 81 ===

Bibliographic Details
Main Authors: ZHENG, MING-ZHI, 鄭明智
Other Authors: ZHAN, GUO-ZHEN
Format: Others
Language:zh-TW
Published: 1993
Online Access:http://ndltd.ncl.edu.tw/handle/48355326074146996203
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spelling ndltd-TW-081NTU024420252016-02-10T04:08:42Z http://ndltd.ncl.edu.tw/handle/48355326074146996203 The investigation of spectroscopic ellipsometer by polarization modulation method 以極化調制法研製橢圓光譜儀 ZHENG, MING-ZHI 鄭明智 碩士 國立臺灣大學 電機工程研究所 81 ZHAN, GUO-ZHEN 詹國禎 1993 學位論文 ; thesis 80 zh-TW
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language zh-TW
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sources NDLTD
description 碩士 === 國立臺灣大學 === 電機工程研究所 === 81 ===
author2 ZHAN, GUO-ZHEN
author_facet ZHAN, GUO-ZHEN
ZHENG, MING-ZHI
鄭明智
author ZHENG, MING-ZHI
鄭明智
spellingShingle ZHENG, MING-ZHI
鄭明智
The investigation of spectroscopic ellipsometer by polarization modulation method
author_sort ZHENG, MING-ZHI
title The investigation of spectroscopic ellipsometer by polarization modulation method
title_short The investigation of spectroscopic ellipsometer by polarization modulation method
title_full The investigation of spectroscopic ellipsometer by polarization modulation method
title_fullStr The investigation of spectroscopic ellipsometer by polarization modulation method
title_full_unstemmed The investigation of spectroscopic ellipsometer by polarization modulation method
title_sort investigation of spectroscopic ellipsometer by polarization modulation method
publishDate 1993
url http://ndltd.ncl.edu.tw/handle/48355326074146996203
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