Study on A New Type Phase Shifting Mask for 0.35.mu. Pattern Transfer
碩士 === 國立交通大學 === 應用化學系 === 81 ===
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| Format: | Others |
| Language: | zh-TW |
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1993
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| Online Access: | http://ndltd.ncl.edu.tw/handle/92138792050489649267 |
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ndltd-TW-081NCTU0500004 |
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oai_dc |
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ndltd-TW-081NCTU05000042016-07-20T04:11:37Z http://ndltd.ncl.edu.tw/handle/92138792050489649267 Study on A New Type Phase Shifting Mask for 0.35.mu. Pattern Transfer 0.35微米新型相轉移光罩之研究 Chou,Yueh Lin 周岳霖 碩士 國立交通大學 應用化學系 81 Loong,Wen An 龍文安 1993 學位論文 ; thesis 0 zh-TW |
| collection |
NDLTD |
| language |
zh-TW |
| format |
Others
|
| sources |
NDLTD |
| description |
碩士 === 國立交通大學 === 應用化學系 === 81 ===
|
| author2 |
Loong,Wen An |
| author_facet |
Loong,Wen An Chou,Yueh Lin 周岳霖 |
| author |
Chou,Yueh Lin 周岳霖 |
| spellingShingle |
Chou,Yueh Lin 周岳霖 Study on A New Type Phase Shifting Mask for 0.35.mu. Pattern Transfer |
| author_sort |
Chou,Yueh Lin |
| title |
Study on A New Type Phase Shifting Mask for 0.35.mu. Pattern Transfer |
| title_short |
Study on A New Type Phase Shifting Mask for 0.35.mu. Pattern Transfer |
| title_full |
Study on A New Type Phase Shifting Mask for 0.35.mu. Pattern Transfer |
| title_fullStr |
Study on A New Type Phase Shifting Mask for 0.35.mu. Pattern Transfer |
| title_full_unstemmed |
Study on A New Type Phase Shifting Mask for 0.35.mu. Pattern Transfer |
| title_sort |
study on a new type phase shifting mask for 0.35.mu. pattern transfer |
| publishDate |
1993 |
| url |
http://ndltd.ncl.edu.tw/handle/92138792050489649267 |
| work_keys_str_mv |
AT chouyuehlin studyonanewtypephaseshiftingmaskfor035mupatterntransfer AT zhōuyuèlín studyonanewtypephaseshiftingmaskfor035mupatterntransfer AT chouyuehlin 035wēimǐxīnxíngxiāngzhuǎnyíguāngzhàozhīyánjiū AT zhōuyuèlín 035wēimǐxīnxíngxiāngzhuǎnyíguāngzhàozhīyánjiū |
| _version_ |
1718354712644812800 |