Study on Contact Resistance of PtSi／poly-Si
碩士 === 國立交通大學 === 電子研究所 === 81 === The thesis studies the contact resistivity of the Ptsi/ p+- polysilicon and PtSi/n+-polysilicon contact structures fabricated by conventional, implant-through-silicide (ITS), and implant-through-mental（ITM...
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| Format: | Others |
| Language: | en_US |
| Online Access: | http://ndltd.ncl.edu.tw/handle/56826553364674902214 |