Evaluation of the Al-Mo and Mo-N Thin Film as a diffusion barrier between Al and Au for electronic packaging

Evaluation of the Al-Mo and Mo-N Thin Film as a diffusion barrier between Al and Au for electronic packaging

碩士 === 國立成功大學 === 材料科學(工程)研究所 === 81 ===

Bibliographic Details
Main Authors:	Yu-Jin Ho, 何游俊
Other Authors:	Kwang-Lung Lin
Format:	Others
Language:	zh-TW
Online Access:	http://ndltd.ncl.edu.tw/handle/05097930968497742112

Similar Items

Mo and Cr Based Diffusion Barrier in Cu and Al Metallization
by: Tu, Shuo-Lun, et al.
Published: (1997)

The Al/Mo/Pd and Al/Mo-N/Pd Thin Films were Investigated as the under Bump Metallurgy between Silicon and Solder
by: Chao, Wen-Hsiuan, et al.
Published: (1996)

Preparation and characterization of Mo/Al layered thin films
by: Giridhar, Jayaramachandran
Published: (2014)

Al-Zr Alloy Films Prepared by Alternate Sputter Deposition and Their Application as the Diffusion Barrier Between Al and Au Layers
by: Jin-Kuo Ho, et al.
Published: (1995)

Characteristics of DC Sputtered Mo and Mo-Ta Thin Films
by: Chyi -Ying Wu, et al.
Published: (2015)

Intermetallic phase formation and breakdown of Mo diffusion barriers in Ni-Mo-Cu and Ni-Mo-Monel 400 diffusion triads /
by: Shueh, Yinsheng
Published: (1988)

Structural, Optical and Electrical Properties of Al+MoO<sub>3</sub> and Au+MoO<sub>3</sub> Thin Films Prepared by Magnetron Codeposition
by: Tihomir Car, et al.
Published: (2021-02-01)

Formation of large-area MoS2 thin films by oxygen-catalyzed sulfurization of Mo thin films
by: Jo, Seong Soon, et al.
Published: (2020)

Fabrication and Characterization of Nano-structured MoN Thin Films
by: XIANG, JIAN-YING, et al.
Published: (2017)

Impact of H2 gas on the properties of MoS2 thin films deposited by sulfurization of Mo thin films
by: Diana Pradhan, et al.
Published: (2021-09-01)

Thickness-dependent electron mobility of single and few-layer MoS2 thin-film transistors
by: Ji Heon Kim, et al.
Published: (2016-06-01)

Microstructure and Toughness Characteristic of Mo in NiAl-Fe Intermetallic Alloy
by: HE,Chun-min, et al.
Published: (2003)

StMoMo: An R Package for Stochastic Mortality Modeling
by: Andrés M. Villegas, et al.
Published: (2018-04-01)

Electrochromic MoO3 thin films prepared by electron beam evaporation
by: Shih, Shun-Chou, et al.
Published: (2008)

以A1-Mo及Mo-N做為電子構裝黃金接點之擴散障礙層的探討
by: He, You-Zun, et al.
Published: (1993)

Low-Temperature Epitaxial Growth of AlN Thin Films on a Mo Electrode/Sapphire Substrate Using Reactive Sputtering
by: Jihong Kim
Published: (2021-04-01)

Study on Microstructure and Mechanical Properties of MoN/CrMoN Multilayer Films
by: Lin, Kun-Yuan, et al.
Published: (2019)

Applications of laser on MoS2 thin films cutting and thinning
by: 陳政昇
Published: (2017)

Phosphorous doped p-type MoS2 polycrystalline thin films via direct sulfurization of Mo film
by: Tomohiro Momose, et al.
Published: (2018-02-01)

A Study of Mo-Al and Pd-Al Schottky Contacts to n-GaAs
by: J.G.Peng, et al.
Published: (1993)

The Studying of growth of the Mo thin film and ZnSeTe thin film
by: Lee,Chen Shung, et al.
Published: (1994)

The Study of Al-Ge Thin Films on Package
by: KaiWen Yang, et al.
Published: (2009)

Etching Profile Control of Mo/Al Film in TFTLCD Array Process
by: Tsao, Lin-Hsiang, et al.
Published: (2015)

Growth of Large-Scale Single-Layered MoS2 Film via MoO3 Vapor Management and Characterization of MoS2 Thin-Film Transistor Arrays
by: CHEN, HUNG-YI, et al.
Published: (2017)

Synthesis and Properties of LiAlFe(Mo, V, MoV, MoMn)Combined Oxides by Chemical Coprecipitation
by: Tsun-ju Wang, et al.
Published: (2007)

Photocatalytic Study of ZnO(:N)/MoO3(:In) Heterostructure Thin Film
by: LIU,CHENG-YOU, et al.
Published: (2019)

Evaluation of Resistivity and Diffusion Barrier Effect in (Ti,Al)N Films
by: Chen, C.S., et al.
Published: (1997)

Development and applications of the DGT (diffusive gradients in thin-films) technique for the measurement of Mo and W in waters and soils
by: Fozard, Susan
Published: (2011)

Spin-states in MoS2 thin-film transistors distinguished by operando electron spin resonance
by: Naho Tsunetomo, et al.
Published: (2021-03-01)

The study of oxidic and sulfided CoMo/Al^^O hydrodesulfurization catalysts
by: YOU, GING-GUAN, et al.
Published: (1988)

Microstructure and Photothermal Conversion Performance of Ti/(Mo-TiAlN)/(Mo-TiAlON)/Al<sub>2</sub>O<sub>3</sub> Selective Absorbing Film for Non-Vacuum High-Temperature Applications
by: Haibin Geng, et al.
Published: (2021-12-01)

Material Properties of Zr–Cu–Ni–Al Thin Films as Diffusion Barrier Layer
by: Po-Hsien Sung, et al.
Published: (2020-06-01)

Preparation of Zr-Al-Mo-Cu Single Targets with Glass Forming Ability and Deposition of Thin Film Metallic Glass
by: Hae Won Yoon, et al.
Published: (2020-04-01)

Temperature-Dependent Electrical Properties of Al2O3-Passivated Multilayer MoS2 Thin-Film Transistors
by: Seok Hwan Jeong, et al.
Published: (2018-03-01)

Interdiffusion behavior in sigma-phase using Ni3Al/Mo diffusion couples
by: Zhou C., et al.
Published: (2011-01-01)

Processing of novel pseudomorphic Cu–Mo hierarchies in thin films
by: Benjamin Derby, et al.
Published: (2019-01-01)

Thermal Stability of Amorphous MoSiZr Thin Films
by: Kaplan, Maciej
Published: (2016)

Transport and Optoelectronics properties of MoS2 thin film transistors
by: Li-Tsung Liu, et al.
Published: (2014)

Magnetron Sputtering MoN/CrMoN Multilayer Film Research on Improving the Performance of Milling Cutter
by: Wu, Qi-Xuan, et al.
Published: (2019)

Formation of CuInAlSe2 film with double graded bandgapusing Mo(Al) back contact
by: Chyi-JengWu, et al.
Published: (2010)