Synthesis of silicon film by glow discharge deposition at room temperature

Synthesis of silicon film by glow discharge deposition at room temperature

碩士 === 大同工學院 === 材料工程研究所 === 80 ===

Bibliographic Details
Main Authors: CHUANG, TE-AN, 莊德安
Other Authors: CHEN, PEI-LI
Format: Others
Language:zh-TW
Published: 1992
Online Access:http://ndltd.ncl.edu.tw/handle/87652070987972657770

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