Factors that affecting the growth of β-SiC thin films from dodecamethylcyclohexasilane

• Main Authors: Huang, Shi-Zhang, 黃士彰
• Other Authors: Qiu, Xing-Tian
• Format: Others
• Language: zh-TW
• Online Access: http://ndltd.ncl.edu.tw/handle/51733928499346327430

碩士 === 國立交通大學 === 應用化學研究所 === 80 ===