Preparation of oriented aln films by R. F. sputtering

Preparation of oriented aln films by R. F. sputtering

碩士 === 國立交通大學 === 材料科學工程研究所 === 80 ===

Bibliographic Details
Main Authors:	CHUANG, JIUNN-YANN, 莊俊彥
Other Authors:	LIN, PANG
Format:	Others
Language:	en_US
Published:	1992
Online Access:	http://ndltd.ncl.edu.tw/handle/54084838009157897088

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