Preparation of oriented aln films by R. F. sputtering

Preparation of oriented aln films by R. F. sputtering

碩士 === 國立交通大學 === 材料科學工程研究所 === 80 ===

Bibliographic Details
Main Authors: CHUANG, JIUNN-YANN, 莊俊彥
Other Authors: LIN, PANG
Format: Others
Language:en_US
Published: 1992
Online Access:http://ndltd.ncl.edu.tw/handle/54084838009157897088
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spelling ndltd-TW-080NCTU21590062015-10-13T14:16:54Z http://ndltd.ncl.edu.tw/handle/54084838009157897088 Preparation of oriented aln films by R. F. sputtering 高週波濺鍍法製備方向性氮化鋁薄膜 CHUANG, JIUNN-YANN 莊俊彥 碩士 國立交通大學 材料科學工程研究所 80 LIN, PANG 林鵬 1992 學位論文 ; thesis 32 en_US
collection NDLTD
language en_US
format Others
sources NDLTD
description 碩士 === 國立交通大學 === 材料科學工程研究所 === 80 ===
author2 LIN, PANG
author_facet LIN, PANG
CHUANG, JIUNN-YANN
莊俊彥
author CHUANG, JIUNN-YANN
莊俊彥
spellingShingle CHUANG, JIUNN-YANN
莊俊彥
Preparation of oriented aln films by R. F. sputtering
author_sort CHUANG, JIUNN-YANN
title Preparation of oriented aln films by R. F. sputtering
title_short Preparation of oriented aln films by R. F. sputtering
title_full Preparation of oriented aln films by R. F. sputtering
title_fullStr Preparation of oriented aln films by R. F. sputtering
title_full_unstemmed Preparation of oriented aln films by R. F. sputtering
title_sort preparation of oriented aln films by r. f. sputtering
publishDate 1992
url http://ndltd.ncl.edu.tw/handle/54084838009157897088
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AT zhuāngjùnyàn gāozhōubōjiàndùfǎzhìbèifāngxiàngxìngdànhuàlǚbáomó
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