Bending beam measurement of thin-film stress and related properties: theoretical and experimental

Bending beam measurement of thin-film stress and related properties: theoretical and experimental

博士 === 國立清華大學 === 材料科學工程研究所 === 79 ===

Bibliographic Details
Main Authors:	Xu, Li, 徐立
Other Authors:	Zhou, Zhuo-Hui
Format:	Others
Language:	zh-TW
Published:	1991
Online Access:	http://ndltd.ncl.edu.tw/handle/72397798588591981015

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