Bending beam measurement of thin-film stress and related properties: theoretical and experimental

博士 === 國立清華大學 === 材料科學工程研究所 === 79 ===

Bibliographic Details
Main Authors: Xu, Li, 徐立
Other Authors: Zhou, Zhuo-Hui
Format: Others
Language:zh-TW
Published: 1991
Online Access:http://ndltd.ncl.edu.tw/handle/72397798588591981015
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spelling ndltd-TW-079NTHU40580012016-07-25T04:07:13Z http://ndltd.ncl.edu.tw/handle/72397798588591981015 Bending beam measurement of thin-film stress and related properties: theoretical and experimental 彎柄儀量測薄膜應力及相關性質:理論與實驗 Xu, Li 徐立 博士 國立清華大學 材料科學工程研究所 79 Zhou, Zhuo-Hui 周卓煇 1991 學位論文 ; thesis 163 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 博士 === 國立清華大學 === 材料科學工程研究所 === 79 ===
author2 Zhou, Zhuo-Hui
author_facet Zhou, Zhuo-Hui
Xu, Li
徐立
author Xu, Li
徐立
spellingShingle Xu, Li
徐立
Bending beam measurement of thin-film stress and related properties: theoretical and experimental
author_sort Xu, Li
title Bending beam measurement of thin-film stress and related properties: theoretical and experimental
title_short Bending beam measurement of thin-film stress and related properties: theoretical and experimental
title_full Bending beam measurement of thin-film stress and related properties: theoretical and experimental
title_fullStr Bending beam measurement of thin-film stress and related properties: theoretical and experimental
title_full_unstemmed Bending beam measurement of thin-film stress and related properties: theoretical and experimental
title_sort bending beam measurement of thin-film stress and related properties: theoretical and experimental
publishDate 1991
url http://ndltd.ncl.edu.tw/handle/72397798588591981015
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