Enhanced oxygen plasma stripping of ion implanted negative resist by hydrogen plasma pretreatment

Enhanced oxygen plasma stripping of ion implanted negative resist by hydrogen plasma pretreatment

碩士 === 國立交通大學 === 應用化學研究所 === 79 ===

Bibliographic Details
Main Authors:	YAN,MING-SHUO, 顏明碩
Other Authors:	LONG,WEN-AN
Format:	Others
Language:	zh-TW
Published:	1991
Online Access:	http://ndltd.ncl.edu.tw/handle/04984497578524687324

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