Enhanced oxygen plasma stripping of ion implanted negative resist by hydrogen plasma pretreatment

Enhanced oxygen plasma stripping of ion implanted negative resist by hydrogen plasma pretreatment

碩士 === 國立交通大學 === 應用化學研究所 === 79 ===

Bibliographic Details
Main Authors: YAN,MING-SHUO, 顏明碩
Other Authors: LONG,WEN-AN
Format: Others
Language:zh-TW
Published: 1991
Online Access:http://ndltd.ncl.edu.tw/handle/04984497578524687324
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spelling ndltd-TW-079NCTU25000162016-07-25T04:07:10Z http://ndltd.ncl.edu.tw/handle/04984497578524687324 Enhanced oxygen plasma stripping of ion implanted negative resist by hydrogen plasma pretreatment 以氫電漿前處理強化氧電漿對離子植入負型阻劑之清除 YAN,MING-SHUO 顏明碩 碩士 國立交通大學 應用化學研究所 79 LONG,WEN-AN 龍文安 1991 學位論文 ; thesis 45 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立交通大學 === 應用化學研究所 === 79 ===
author2 LONG,WEN-AN
author_facet LONG,WEN-AN
YAN,MING-SHUO
顏明碩
author YAN,MING-SHUO
顏明碩
spellingShingle YAN,MING-SHUO
顏明碩
Enhanced oxygen plasma stripping of ion implanted negative resist by hydrogen plasma pretreatment
author_sort YAN,MING-SHUO
title Enhanced oxygen plasma stripping of ion implanted negative resist by hydrogen plasma pretreatment
title_short Enhanced oxygen plasma stripping of ion implanted negative resist by hydrogen plasma pretreatment
title_full Enhanced oxygen plasma stripping of ion implanted negative resist by hydrogen plasma pretreatment
title_fullStr Enhanced oxygen plasma stripping of ion implanted negative resist by hydrogen plasma pretreatment
title_full_unstemmed Enhanced oxygen plasma stripping of ion implanted negative resist by hydrogen plasma pretreatment
title_sort enhanced oxygen plasma stripping of ion implanted negative resist by hydrogen plasma pretreatment
publishDate 1991
url http://ndltd.ncl.edu.tw/handle/04984497578524687324
work_keys_str_mv AT yanmingshuo enhancedoxygenplasmastrippingofionimplantednegativeresistbyhydrogenplasmapretreatment
AT yánmíngshuò enhancedoxygenplasmastrippingofionimplantednegativeresistbyhydrogenplasmapretreatment
AT yanmingshuo yǐqīngdiànjiāngqiánchùlǐqiánghuàyǎngdiànjiāngduìlízizhírùfùxíngzǔjìzhīqīngchú
AT yánmíngshuò yǐqīngdiànjiāngqiánchùlǐqiánghuàyǎngdiànjiāngduìlízizhírùfùxíngzǔjìzhīqīngchú
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