Interfacial reactions of transition metal thin films on ion implanted silicon

Interfacial reactions of transition metal thin films on ion implanted silicon

博士 === 國立清華大學 === 材料科學工程研究所 === 77 ===

Bibliographic Details
Main Authors: LU, HUO-TIE, 盧火鐵
Other Authors: CHEN, LI-JUN
Format: Others
Language:zh-TW
Published: 1989
Online Access:http://ndltd.ncl.edu.tw/handle/12122072808520670614
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spelling ndltd-TW-077NTHU21590062016-02-19T04:05:19Z http://ndltd.ncl.edu.tw/handle/12122072808520670614 Interfacial reactions of transition metal thin films on ion implanted silicon 過渡金屬與離子佈植矽之界面反應 LU, HUO-TIE 盧火鐵 博士 國立清華大學 材料科學工程研究所 77 CHEN, LI-JUN 陳力俊 1989 學位論文 ; thesis 0 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 博士 === 國立清華大學 === 材料科學工程研究所 === 77 ===
author2 CHEN, LI-JUN
author_facet CHEN, LI-JUN
LU, HUO-TIE
盧火鐵
author LU, HUO-TIE
盧火鐵
spellingShingle LU, HUO-TIE
盧火鐵
Interfacial reactions of transition metal thin films on ion implanted silicon
author_sort LU, HUO-TIE
title Interfacial reactions of transition metal thin films on ion implanted silicon
title_short Interfacial reactions of transition metal thin films on ion implanted silicon
title_full Interfacial reactions of transition metal thin films on ion implanted silicon
title_fullStr Interfacial reactions of transition metal thin films on ion implanted silicon
title_full_unstemmed Interfacial reactions of transition metal thin films on ion implanted silicon
title_sort interfacial reactions of transition metal thin films on ion implanted silicon
publishDate 1989
url http://ndltd.ncl.edu.tw/handle/12122072808520670614
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AT lúhuǒtiě guòdùjīnshǔyǔlízibùzhíxìzhījièmiànfǎnyīng
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