Fabrication of TaSi�� self-aligned gate GaAs MESFET with the channel by through TaSi�� film implantation
碩士 === 國立清華大學 === 電機工程研究所 === 75 ===
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| Language: | zh-TW |
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1992
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| Online Access: | http://ndltd.ncl.edu.tw/handle/68662163819340329970 |
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ndltd-TW-075NTHU2442063 |
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ndltd-TW-075NTHU24420632016-02-12T04:10:38Z http://ndltd.ncl.edu.tw/handle/68662163819340329970 Fabrication of TaSi�� self-aligned gate GaAs MESFET with the channel by through TaSi�� film implantation 穿膜淺通道鉭矽化物自準閘極砷化鎵金屬半導場效電晶體之研製 徐萬泰 碩士 國立清華大學 電機工程研究所 75 LIN, MIN-XIONG 葉鳳生 1992 學位論文 ; thesis 0 zh-TW |
| collection |
NDLTD |
| language |
zh-TW |
| format |
Others
|
| sources |
NDLTD |
| description |
碩士 === 國立清華大學 === 電機工程研究所 === 75 ===
|
| author2 |
LIN, MIN-XIONG |
| author_facet |
LIN, MIN-XIONG 徐萬泰 |
| author |
徐萬泰 |
| spellingShingle |
徐萬泰 Fabrication of TaSi�� self-aligned gate GaAs MESFET with the channel by through TaSi�� film implantation |
| author_sort |
徐萬泰 |
| title |
Fabrication of TaSi�� self-aligned gate GaAs MESFET with the channel by through TaSi�� film implantation |
| title_short |
Fabrication of TaSi�� self-aligned gate GaAs MESFET with the channel by through TaSi�� film implantation |
| title_full |
Fabrication of TaSi�� self-aligned gate GaAs MESFET with the channel by through TaSi�� film implantation |
| title_fullStr |
Fabrication of TaSi�� self-aligned gate GaAs MESFET with the channel by through TaSi�� film implantation |
| title_full_unstemmed |
Fabrication of TaSi�� self-aligned gate GaAs MESFET with the channel by through TaSi�� film implantation |
| title_sort |
fabrication of tasi�� self-aligned gate gaas mesfet with the channel by through tasi�� film implantation |
| publishDate |
1992 |
| url |
http://ndltd.ncl.edu.tw/handle/68662163819340329970 |
| work_keys_str_mv |
AT xúwàntài fabricationoftasiselfalignedgategaasmesfetwiththechannelbythroughtasifilmimplantation AT xúwàntài chuānmóqiǎntōngdàotǎnxìhuàwùzìzhǔnzhájíshēnhuàjiājīnshǔbàndǎochǎngxiàodiànjīngtǐzhīyánzhì |
| _version_ |
1718186970678558720 |