Silicon micromachining technique and applications

Silicon micromachining technique and applications

博士 === 國立交通大學 === 光電工程研究所 === 75 ===

Bibliographic Details
Main Author:	翁炳國
Other Authors:	LI, YA-JUN
Format:	Others
Language:	zh-TW
Published:	1992
Online Access:	http://ndltd.ncl.edu.tw/handle/05055598641774567988

Internet

http://ndltd.ncl.edu.tw/handle/05055598641774567988