Fabrication and evaluation of Si and InSb MIS diodes prepared by photo-CVD with Br2 vapor etch
碩士 === 國立交通大學 === 光電(科學)研究所 === 75 ===
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1987
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Online Access: | http://ndltd.ncl.edu.tw/handle/53354072995679525538 |
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ndltd-TW-075NCTU21230062016-02-12T04:10:33Z http://ndltd.ncl.edu.tw/handle/53354072995679525538 Fabrication and evaluation of Si and InSb MIS diodes prepared by photo-CVD with Br2 vapor etch 以溴蒸氣通入光化學氣相沉積系統所製成SI和InSbMIS二極體的評估 YANG, ZHONG-ZHENG 楊忠正 碩士 國立交通大學 光電(科學)研究所 75 HUANG, KAI-FENG 黃凱風 1987 學位論文 ; thesis 0 zh-TW |
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zh-TW |
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Others
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NDLTD |
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碩士 === 國立交通大學 === 光電(科學)研究所 === 75 ===
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author2 |
HUANG, KAI-FENG |
author_facet |
HUANG, KAI-FENG YANG, ZHONG-ZHENG 楊忠正 |
author |
YANG, ZHONG-ZHENG 楊忠正 |
spellingShingle |
YANG, ZHONG-ZHENG 楊忠正 Fabrication and evaluation of Si and InSb MIS diodes prepared by photo-CVD with Br2 vapor etch |
author_sort |
YANG, ZHONG-ZHENG |
title |
Fabrication and evaluation of Si and InSb MIS diodes prepared by photo-CVD with Br2 vapor etch |
title_short |
Fabrication and evaluation of Si and InSb MIS diodes prepared by photo-CVD with Br2 vapor etch |
title_full |
Fabrication and evaluation of Si and InSb MIS diodes prepared by photo-CVD with Br2 vapor etch |
title_fullStr |
Fabrication and evaluation of Si and InSb MIS diodes prepared by photo-CVD with Br2 vapor etch |
title_full_unstemmed |
Fabrication and evaluation of Si and InSb MIS diodes prepared by photo-CVD with Br2 vapor etch |
title_sort |
fabrication and evaluation of si and insb mis diodes prepared by photo-cvd with br2 vapor etch |
publishDate |
1987 |
url |
http://ndltd.ncl.edu.tw/handle/53354072995679525538 |
work_keys_str_mv |
AT yangzhongzheng fabricationandevaluationofsiandinsbmisdiodespreparedbyphotocvdwithbr2vaporetch AT yángzhōngzhèng fabricationandevaluationofsiandinsbmisdiodespreparedbyphotocvdwithbr2vaporetch AT yangzhongzheng yǐxiùzhēngqìtōngrùguānghuàxuéqìxiāngchénjīxìtǒngsuǒzhìchéngsihéinsbmisèrjítǐdepínggū AT yángzhōngzhèng yǐxiùzhēngqìtōngrùguānghuàxuéqìxiāngchénjīxìtǒngsuǒzhìchéngsihéinsbmisèrjítǐdepínggū |
_version_ |
1718186268863496192 |