Fabrication and evaluation of Si and InSb MIS diodes prepared by photo-CVD with Br2 vapor etch

碩士 === 國立交通大學 === 光電(科學)研究所 === 75 ===

Bibliographic Details
Main Authors: YANG, ZHONG-ZHENG, 楊忠正
Other Authors: HUANG, KAI-FENG
Format: Others
Language:zh-TW
Published: 1987
Online Access:http://ndltd.ncl.edu.tw/handle/53354072995679525538
id ndltd-TW-075NCTU2123006
record_format oai_dc
spelling ndltd-TW-075NCTU21230062016-02-12T04:10:33Z http://ndltd.ncl.edu.tw/handle/53354072995679525538 Fabrication and evaluation of Si and InSb MIS diodes prepared by photo-CVD with Br2 vapor etch 以溴蒸氣通入光化學氣相沉積系統所製成SI和InSbMIS二極體的評估 YANG, ZHONG-ZHENG 楊忠正 碩士 國立交通大學 光電(科學)研究所 75 HUANG, KAI-FENG 黃凱風 1987 學位論文 ; thesis 0 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立交通大學 === 光電(科學)研究所 === 75 ===
author2 HUANG, KAI-FENG
author_facet HUANG, KAI-FENG
YANG, ZHONG-ZHENG
楊忠正
author YANG, ZHONG-ZHENG
楊忠正
spellingShingle YANG, ZHONG-ZHENG
楊忠正
Fabrication and evaluation of Si and InSb MIS diodes prepared by photo-CVD with Br2 vapor etch
author_sort YANG, ZHONG-ZHENG
title Fabrication and evaluation of Si and InSb MIS diodes prepared by photo-CVD with Br2 vapor etch
title_short Fabrication and evaluation of Si and InSb MIS diodes prepared by photo-CVD with Br2 vapor etch
title_full Fabrication and evaluation of Si and InSb MIS diodes prepared by photo-CVD with Br2 vapor etch
title_fullStr Fabrication and evaluation of Si and InSb MIS diodes prepared by photo-CVD with Br2 vapor etch
title_full_unstemmed Fabrication and evaluation of Si and InSb MIS diodes prepared by photo-CVD with Br2 vapor etch
title_sort fabrication and evaluation of si and insb mis diodes prepared by photo-cvd with br2 vapor etch
publishDate 1987
url http://ndltd.ncl.edu.tw/handle/53354072995679525538
work_keys_str_mv AT yangzhongzheng fabricationandevaluationofsiandinsbmisdiodespreparedbyphotocvdwithbr2vaporetch
AT yángzhōngzhèng fabricationandevaluationofsiandinsbmisdiodespreparedbyphotocvdwithbr2vaporetch
AT yangzhongzheng yǐxiùzhēngqìtōngrùguānghuàxuéqìxiāngchénjīxìtǒngsuǒzhìchéngsihéinsbmisèrjítǐdepínggū
AT yángzhōngzhèng yǐxiùzhēngqìtōngrùguānghuàxuéqìxiāngchénjīxìtǒngsuǒzhìchéngsihéinsbmisèrjítǐdepínggū
_version_ 1718186268863496192