A study on low defect density RF-heated epitaxial silicon

A study on low defect density RF-heated epitaxial silicon

碩士 === 中原大學 === 應用物理研究所 === 74 ===

Bibliographic Details
Main Authors:	YANG, ZHONG-MING, 楊中明
Other Authors:	XIONG, SHEN-GAN
Format:	Others
Language:	zh-TW
Published:	1986
Online Access:	http://ndltd.ncl.edu.tw/handle/11186278574751212942

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