The structural properties of a - si: H film prepared by PECVD system

The structural properties of a - si: H film prepared by PECVD system

碩士 === 中原大學 === 電子工程研究所 === 71 ===

Bibliographic Details
Main Authors:	Sun, En-Yuan, 孫恩源
Other Authors:	Xiong, Shen-Gan
Format:	Others
Language:	zh-TW
Online Access:	http://ndltd.ncl.edu.tw/handle/09743618663403649892

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