FEM simulation of residual stresses of thin films for applications in MEMS
In MEMS sensors, such as resonators based on cantilever and doubly-clamped beams, the presence of residual stresses in the thin films disrupt their mechanical properties or eigenfrequencies and, in some cases, can destroy the structure. This thesis aims to simulate the residual stresses in wafers co...
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| Format: | Dissertation |
| Language: | English |
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Pontificia Universidad Católica del Perú
2017
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| Online Access: | http://hdl.handle.net/20.500.12404/8831 |